Impact of Quartz Tubes on Carrier Lifetime Reduction (Part 5 of 10)

Carrier lifetime reduction can involve multiple factors, especially in quartz tube application scenarios such as semiconductors, photovoltaics, or high-temperature processes. The main causes include:

1. Quartz Tube Material Issues

  • High impurity content: Metallic ions (such as Fe, Cu, Na) or hydroxyl (OHโป) impurities can form recombination centers, accelerating carrier recombination and reducing lifetime.
  • Crystal defects: Structural defects in quartz tubes during manufacturing (such as dislocations and vacancies) may trap carriers, decreasing their effective lifetime.
  • Insufficient purity: Synthetic quartz (e.g., high-purity SiOโ‚‚) generally offers better carrier lifetime performance than natural quartz. If the supplierโ€™s material purity does not meet the required standard, problems may arise.
Quartz Tubes in Annealing Furnaces
Quartz Tubes in Annealing Furnaces

2. Process or Environmental Factors

  • High-temperature contamination: In high-temperature processes (such as diffusion or annealing), quartz tubes may release impurities or react with process gases (such as Oโ‚‚, Hโ‚‚), contaminating wafers or samples.
  • Surface contamination: Inadequate cleaning of quartz tubes (residual particles, organic matter) or improper storage (exposure to dust, moisture) can introduce surface recombination centers.
  • Thermal stress damage: Rapid heating and cooling can cause microcracks in quartz tubes. Internal stress regions may become active sites for carrier recombination.

3. Testing and Usage Condition Issues

  • Mismatch in process parameters: For example, if the temperature exceeds the quartz tubeโ€™s tolerance (ordinary quartz tubes may crystallize above 1200ยฐC) or if the gas environment corrodes the tube wall (such as Clโ‚‚, HF).
  • Measurement errors: Carrier lifetime testing methods (such as microwave photoconductive decay ฮผ-PCD and quasi-steady-state photoconductance QSSPC) are affected by sample surface condition, light intensity, and other factors, so testing interference must be eliminated.

4. Potential Problems from Other Suppliers

  • Deviation in custom specifications: If quartz tube dimensions (such as uneven wall thickness) or coatings (such as anti-reflective coatings) are not optimized to customer requirements, they may cause uneven heat distribution or local defects.
  • False labeling of parameters: Some suppliers may falsely claim purity levels (e.g., labeling as โ€œhigh purityโ€ but actually not reaching 99.99% SiOโ‚‚) or fail to disclose hydroxyl content (which affects UV transmittance).

Technical Solutions

  • Recommend using low-hydroxyl synthetic quartz tubes to reduce UV absorption and impurity recombination centers.
  • Offer custom quartz tube pre-treatment services (such as high-temperature annealing and etching cleaning) to eliminate surface contamination.

Request a consultation

ๆปšๅŠจ่‡ณ้กถ้ƒจ