\u1ed0ng th\u1ea1ch anh th\u01b0\u1eddng \u0111\u01b0\u1ee3c s\u1eed d\u1ee5ng trong l\u00f2 khu\u1ebfch t\u00e1n nhi\u1ec7t \u0111\u1ed9 cao cho wafer b\u00e1n d\u1eabn \u0111\u1ec3 khu\u1ebfch t\u00e1n ch\u1ea5t ph\u1ee5 gia (nh\u01b0 ph\u1ed1t pho ho\u1eb7c bo) ho\u1eb7c \u1ee7 nhi\u1ec7t (k\u00edch ho\u1ea1t ch\u1ea5t ph\u1ee5 gia).
Tu\u1ed5i th\u1ecd c\u1ee7a c\u00e1c h\u1ea1t mang l\u00e0 m\u1ed9t th\u00f4ng s\u1ed1 quan tr\u1ecdng \u0111\u1ec3 \u0111\u00e1nh gi\u00e1 ch\u1ea5t l\u01b0\u1ee3ng c\u1ee7a t\u1ea5m wafer silicon. N\u1ebfu c\u00e1c t\u1ea1p ch\u1ea5t trong \u1ed1ng th\u1ea1ch anh (ch\u1eb3ng h\u1ea1n nh\u01b0 ion kim lo\u1ea1i) l\u00e0m \u00f4 nhi\u1ec5m c\u00e1c t\u1ea5m wafer, \u0111i\u1ec1u n\u00e0y c\u00f3 th\u1ec3 d\u1eabn \u0111\u1ebfn t\u0103ng t\u00e1i k\u1ebft h\u1ee3p c\u1ee7a c\u00e1c h\u1ea1t mang v\u00e0 gi\u1ea3m tu\u1ed5i th\u1ecd c\u1ee7a ch\u00fang.
C\u00e1c th\u1eed nghi\u1ec7m bao g\u1ed3m vi\u1ec7c \u0111o th\u1eddi gian t\u1ed3n t\u1ea1i c\u1ee7a c\u00e1c h\u1ea1t mang \u0111i\u1ec7n thi\u1ec3u s\u1ed1 \u0111\u1ec3 \u0111\u00e1nh gi\u00e1 t\u00e1c \u0111\u1ed9ng c\u1ee7a qu\u00e1 tr\u00ecnh s\u1ea3n xu\u1ea5t \u0111\u1ed1i v\u1edbi hi\u1ec7u su\u1ea5t \u0111i\u1ec7n c\u1ee7a wafer.<\/p>\n\n\n\n
Epitaxy:<\/strong> X\u1eed l\u00fd t\u1ea5m wafer silicon quang \u0111i\u1ec7n:<\/strong> Quy tr\u00ecnh s\u1ea3n xu\u1ea5t thi\u1ebft b\u1ecb SiC\/GaN:<\/strong> S\u1ea3n xu\u1ea5t c\u1ea3m bi\u1ebfn quang ho\u1eb7c c\u1ea3m bi\u1ebfn:<\/strong> Ki\u1ec3m tra c\u1ea5p ph\u00f2ng th\u00ed nghi\u1ec7m:<\/strong> \u0110\u1ed9 nh\u1ea1y trong su\u1ed1t v\u00f2ng \u0111\u1eddi c\u1ee7a ch\u1ea5t mang:<\/strong> \u1ee8ng d\u1ee5ng c\u1ee7a \u1ed1ng th\u1ea1ch anh trong m\u00f4i tr\u01b0\u1eddng nhi\u1ec7t \u0111\u1ed9 cao:<\/strong> 1. Semiconductor Device Manufacturing (Highly Relevant) High-Temperature Diffusion\/Annealing Processes:Quartz tubes are commonly used in semiconductor wafer high-temperature diffusion furnaces for doping (such as phosphorus or boron diffusion) or annealing (activating dopants).Carrier lifetime is a key parameter for evaluating silicon wafer quality. If quartz tube impurities (such as metal ions) contaminate the wafers, it can lead […]<\/p>\n","protected":false},"author":1,"featured_media":6409,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"_seopress_robots_primary_cat":"none","_seopress_titles_title":"Which Tests Require Attention to Carrier Lifetime Values ((Part 3 of 10)","_seopress_titles_desc":"","_seopress_robots_index":"","_uag_custom_page_level_css":"","site-sidebar-layout":"default","site-content-layout":"","ast-site-content-layout":"default","site-content-style":"default","site-sidebar-style":"default","ast-global-header-display":"","ast-banner-title-visibility":"","ast-main-header-display":"","ast-hfb-above-header-display":"","ast-hfb-below-header-display":"","ast-hfb-mobile-header-display":"","site-post-title":"","ast-breadcrumbs-content":"","ast-featured-img":"","footer-sml-layout":"","ast-disable-related-posts":"","theme-transparent-header-meta":"","adv-header-id-meta":"","stick-header-meta":"","header-above-stick-meta":"","header-main-stick-meta":"","header-below-stick-meta":"","astra-migrate-meta-layouts":"set","ast-page-background-enabled":"default","ast-page-background-meta":{"desktop":{"background-color":"var(--ast-global-color-4)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"tablet":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"mobile":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""}},"ast-content-background-meta":{"desktop":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"tablet":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"mobile":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""}},"footnotes":""},"categories":[1],"tags":[],"ppma_author":[21],"class_list":["post-6406","post","type-post","status-publish","format-standard","has-post-thumbnail","hentry","category-uncategorized","author-nola"],"uagb_featured_image_src":{"full":["https:\/\/globalquartztube.com\/wp-content\/uploads\/2025\/08\/High-temperature-diffusion-furnace.jpg",884,879,false],"thumbnail":["https:\/\/globalquartztube.com\/wp-content\/uploads\/2025\/08\/High-temperature-diffusion-furnace-150x150.jpg",150,150,true],"medium":["https:\/\/globalquartztube.com\/wp-content\/uploads\/2025\/08\/High-temperature-diffusion-furnace-300x298.jpg",300,298,true],"medium_large":["https:\/\/globalquartztube.com\/wp-content\/uploads\/2025\/08\/High-temperature-diffusion-furnace-768x764.jpg",768,764,true],"large":["https:\/\/globalquartztube.com\/wp-content\/uploads\/2025\/08\/High-temperature-diffusion-furnace.jpg",884,879,false],"1536x1536":["https:\/\/globalquartztube.com\/wp-content\/uploads\/2025\/08\/High-temperature-diffusion-furnace.jpg",884,879,false],"2048x2048":["https:\/\/globalquartztube.com\/wp-content\/uploads\/2025\/08\/High-temperature-diffusion-furnace.jpg",884,879,false],"trp-custom-language-flag":["https:\/\/globalquartztube.com\/wp-content\/uploads\/2025\/08\/High-temperature-diffusion-furnace-12x12.jpg",12,12,true]},"uagb_author_info":{"display_name":"Nola Zhang","author_link":"https:\/\/globalquartztube.com\/vi\/author\/nola\/"},"uagb_comment_info":9,"uagb_excerpt":"1. Semiconductor Device Manufacturing (Highly Relevant) High-Temperature Diffusion\/Annealing Processes:Quartz tubes are commonly used in semiconductor wafer high-temperature diffusion furnaces for doping (such as phosphorus or boron diffusion) or annealing (activating dopants).Carrier lifetime is a key parameter for evaluating silicon wafer quality. If quartz tube impurities (such as metal ions) contaminate the wafers, it can lead…","authors":[{"term_id":21,"user_id":1,"is_guest":0,"slug":"nola","display_name":"Nola Zhang","avatar_url":{"url":"https:\/\/globalquartztube.com\/wp-content\/uploads\/2024\/06\/Casper-Peng.webp","url2x":"https:\/\/globalquartztube.com\/wp-content\/uploads\/2024\/06\/Casper-Peng.webp"},"0":null,"1":"","2":"","3":"","4":"","5":"","6":"","7":""}],"_links":{"self":[{"href":"https:\/\/globalquartztube.com\/vi\/wp-json\/wp\/v2\/posts\/6406","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/globalquartztube.com\/vi\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/globalquartztube.com\/vi\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/globalquartztube.com\/vi\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/globalquartztube.com\/vi\/wp-json\/wp\/v2\/comments?post=6406"}],"version-history":[{"count":3,"href":"https:\/\/globalquartztube.com\/vi\/wp-json\/wp\/v2\/posts\/6406\/revisions"}],"predecessor-version":[{"id":6494,"href":"https:\/\/globalquartztube.com\/vi\/wp-json\/wp\/v2\/posts\/6406\/revisions\/6494"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/globalquartztube.com\/vi\/wp-json\/wp\/v2\/media\/6409"}],"wp:attachment":[{"href":"https:\/\/globalquartztube.com\/vi\/wp-json\/wp\/v2\/media?parent=6406"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/globalquartztube.com\/vi\/wp-json\/wp\/v2\/categories?post=6406"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/globalquartztube.com\/vi\/wp-json\/wp\/v2\/tags?post=6406"},{"taxonomy":"author","embeddable":true,"href":"https:\/\/globalquartztube.com\/vi\/wp-json\/wp\/v2\/ppma_author?post=6406"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}
\u1ed0ng th\u1ea1ch anh \u0111\u01b0\u1ee3c s\u1eed d\u1ee5ng trong bu\u1ed3ng ph\u1ea3n \u1ee9ng CVD (\u0110\u00f3ng b\u0103ng h\u01a1i h\u00f3a h\u1ecdc). N\u1ebfu th\u00e0nh \u1ed1ng b\u1ecb \u00f4 nhi\u1ec5m ho\u1eb7c x\u1ea3y ra hi\u1ec7n t\u01b0\u1ee3ng m\u1ea5t th\u1ee7y tinh h\u00f3a, ch\u1ea5t l\u01b0\u1ee3ng c\u1ee7a l\u1edbp epitaxial c\u00f3 th\u1ec3 b\u1ecb \u1ea3nh h\u01b0\u1edfng, d\u1eabn \u0111\u1ebfn gi\u1ea3m tu\u1ed5i th\u1ecd c\u1ee7a c\u00e1c h\u1ea1t mang.<\/p>\n\n\n\n
\n\n\n\n![\"L\u00f2](\"https:\/\/globalquartztube.com\/wp-content\/uploads\/2025\/08\/High-temperature-diffusion-furnace.jpg\")
2. Ki\u1ec3m tra pin m\u1eb7t tr\u1eddi (pin quang \u0111i\u1ec7n)<\/h3>\n\n\n\n
Trong c\u00e1c quy tr\u00ecnh s\u1ea3n xu\u1ea5t t\u1ebf b\u00e0o quang \u0111i\u1ec7n hi\u1ec7u su\u1ea5t cao nh\u01b0 PERC v\u00e0 TOPCon, \u1ed1ng th\u1ea1ch anh \u0111\u01b0\u1ee3c s\u1eed d\u1ee5ng \u0111\u1ec3 l\u1eafng \u0111\u1ecdng l\u1edbp passivation (nh\u01b0 SiNx ho\u1eb7c Al\u2082O\u2083) ho\u1eb7c nung \u1edf nhi\u1ec7t \u0111\u1ed9 cao.
Tu\u1ed5i th\u1ecd c\u1ee7a ch\u1ea5t mang c\u00f3 \u1ea3nh h\u01b0\u1edfng tr\u1ef1c ti\u1ebfp \u0111\u1ebfn hi\u1ec7u su\u1ea5t chuy\u1ec3n \u0111\u1ed5i c\u1ee7a t\u1ebf b\u00e0o. N\u1ebfu \u1ed1ng th\u1ea1ch anh g\u00e2y ra \u00f4 nhi\u1ec5m, t\u1ef7 l\u1ec7 t\u00e1i k\u1ebft h\u1ee3p b\u1ec1 m\u1eb7t c\u1ee7a wafer s\u1ebd t\u0103ng l\u00ean.
C\u00e1c ph\u00e9p \u0111o \u0111\u01b0\u1ee3c th\u1ef1c hi\u1ec7n b\u1eb1ng ph\u01b0\u01a1ng ph\u00e1p QSSPC (Quasi-Steady-State Photoconductance) ho\u1eb7c \u03bc-PCD (Microwave Photoconductance Decay) \u0111\u1ec3 x\u00e1c \u0111\u1ecbnh th\u1eddi gian s\u1ed1ng c\u1ee7a c\u00e1c h\u1ea1t mang \u0111i\u1ec7n thi\u1ec3u s\u1ed1.<\/p>\n\n\n\n
\n\n\n\n3. Nghi\u00ean c\u1ee9u v\u1eadt li\u1ec7u (v\u00ed d\u1ee5: V\u1eadt li\u1ec7u b\u00e1n d\u1eabn c\u00f3 kho\u1ea3ng c\u00e1ch n\u0103ng l\u01b0\u1ee3ng r\u1ed9ng)<\/h3>\n\n\n\n
C\u00e1c quy tr\u00ecnh nhi\u1ec7t \u0111\u1ed9 cao (>1500\u00b0C) cho c\u00e1c thi\u1ebft b\u1ecb silicon carbide (SiC) ho\u1eb7c gallium nitride (GaN) y\u00eau c\u1ea7u \u1ed1ng th\u1ea1ch anh si\u00eau tinh khi\u1ebft. T\u1ea1p ch\u1ea5t c\u00f3 th\u1ec3 l\u00e0m t\u0103ng m\u1eadt \u0111\u1ed9 tr\u1ea1ng th\u00e1i giao di\u1ec7n, d\u1eabn \u0111\u1ebfn gi\u1ea3m tu\u1ed5i th\u1ecd c\u1ee7a c\u00e1c h\u1ea1t mang.
Nghi\u00ean c\u1ee9u th\u01b0\u1eddng t\u1eadp trung v\u00e0o c\u00e1c t\u00ednh ch\u1ea5t \u0111i\u1ec7n c\u1ee7a c\u00e1c l\u1edbp epitaxial ho\u1eb7c c\u00e1c l\u1edbp oxit.<\/p>\n\n\n\n
\n\n\n\n4. C\u00e1c x\u00e9t nghi\u1ec7m li\u00ean quan kh\u00e1c<\/h3>\n\n\n\n
Tu\u1ed5i th\u1ecd c\u1ee7a ch\u1ea5t mang \u1ea3nh h\u01b0\u1edfng \u0111\u1ebfn t\u1ed1c \u0111\u1ed9 ph\u1ea3n h\u1ed3i. N\u1ebfu \u1ed1ng th\u1ea1ch anh l\u00e0m \u00f4 nhi\u1ec5m c\u00e1c v\u1eadt li\u1ec7u nh\u1ea1y c\u1ea3m (nh\u01b0 InGaAs), hi\u1ec7u su\u1ea5t c\u1ee7a thi\u1ebft b\u1ecb c\u00f3 th\u1ec3 b\u1ecb suy gi\u1ea3m.<\/p>\n\n\n\n
M\u1ed9t s\u1ed1 kh\u00e1ch h\u00e0ng c\u00f3 th\u1ec3 s\u1eed d\u1ee5ng \u1ed1ng th\u1ea1ch anh l\u00e0m b\u00ecnh ph\u1ea3n \u1ee9ng \u0111\u1ec3 ki\u1ec3m tra \u0111\u1ed9ng h\u1ecdc c\u1ee7a v\u1eadt li\u1ec7u mang (nh\u01b0 perovskites).<\/p>\n\n\n\n
\n\n\n\n\u0110\u00e1nh gi\u00e1 t\u00ednh ph\u00f9 h\u1ee3p<\/h3>\n\n\n\n
Tham s\u1ed1 n\u00e0y c\u00f3 vai tr\u00f2 quan tr\u1ecdng trong l\u0129nh v\u1ef1c b\u00e1n d\u1eabn v\u00e0 quang \u0111i\u1ec7n, trong khi c\u00e1c th\u00ed nghi\u1ec7m c\u00f4ng nghi\u1ec7p ho\u1eb7c h\u00f3a h\u1ecdc th\u00f4ng th\u01b0\u1eddng th\u01b0\u1eddng kh\u00f4ng \u0111o l\u01b0\u1eddng c\u1ee5 th\u1ec3 tham s\u1ed1 n\u00e0y.<\/p>\n\n\n\n
C\u00e1c th\u00ed nghi\u1ec7m h\u00f3a h\u1ecdc th\u00f4ng th\u01b0\u1eddng c\u00f3 y\u00eau c\u1ea7u \u0111\u1ed9 tinh khi\u1ebft t\u01b0\u01a1ng \u0111\u1ed1i th\u1ea5p \u0111\u1ed1i v\u1edbi \u1ed1ng th\u1ea1ch anh, trong khi c\u00e1c quy tr\u00ecnh b\u00e1n d\u1eabn\/quang \u0111i\u1ec7n c\u1ef1c k\u1ef3 nh\u1ea1y c\u1ea3m v\u1edbi \u00f4 nhi\u1ec5m.<\/p>","protected":false},"excerpt":{"rendered":"