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\u30ad\u30e3\u30ea\u30a2\u306e\u30e9\u30a4\u30d5\u30bf\u30a4\u30e0\u306f\u3001\u30b7\u30ea\u30b3\u30f3\u30a6\u30a7\u30fc\u30cf\u306e\u54c1\u8cea\u3092\u8a55\u4fa1\u3059\u308b\u4e0a\u3067\u91cd\u8981\u306a\u30d1\u30e9\u30e1\u30fc\u30bf\u3067\u3042\u308b\u3002\u77f3\u82f1\u7ba1\u306e\u4e0d\u7d14\u7269\uff08\u91d1\u5c5e\u30a4\u30aa\u30f3\u306a\u3069\uff09\u304c\u30a6\u30a7\u30fc\u30cf\u3092\u6c5a\u67d3\u3059\u308b\u3068\u3001\u30ad\u30e3\u30ea\u30a2\u306e\u518d\u7d50\u5408\u304c\u5897\u52a0\u3057\u3001\u30e9\u30a4\u30d5\u30bf\u30a4\u30e0\u304c\u77ed\u304f\u306a\u308b\u53ef\u80fd\u6027\u304c\u3042\u308a\u307e\u3059\u3002.
\u30c6\u30b9\u30c8\u3067\u306f\u3001\u5c11\u6570\u30ad\u30e3\u30ea\u30a2\u306e\u30e9\u30a4\u30d5\u30bf\u30a4\u30e0\u3092\u6e2c\u5b9a\u3057\u3001\u30a6\u30a7\u30cf\u30fc\u306e\u96fb\u6c17\u7684\u6027\u80fd\u3078\u306e\u30d7\u30ed\u30bb\u30b9\u5f71\u97ff\u3092\u8a55\u4fa1\u3059\u308b\u3002.<\/p>\n\n\n\n
\u30a8\u30d4\u30bf\u30ad\u30b7\u30fc\uff1a<\/strong> \u30bd\u30fc\u30e9\u30fc\u30b7\u30ea\u30b3\u30f3\u30a6\u30a7\u30cf\u30fc\u52a0\u5de5\uff1a<\/strong> SiC\/GaN\u30c7\u30d0\u30a4\u30b9\u30d7\u30ed\u30bb\u30b9\uff1a<\/strong> \u5149\u691c\u51fa\u5668\u307e\u305f\u306f\u30bb\u30f3\u30b5\u30fc\u306e\u88fd\u9020<\/strong> \u7814\u7a76\u5ba4\u30ec\u30d9\u30eb\u306e\u8a66\u9a13\uff1a<\/strong> \u30ad\u30e3\u30ea\u30a2\u5bff\u547d\u611f\u5ea6\uff1a<\/strong> \u77f3\u82f1\u7ba1\u306e\u9ad8\u6e29\u5fdc\u7528\uff1a<\/strong> 1. Semiconductor Device Manufacturing (Highly Relevant) High-Temperature Diffusion\/Annealing Processes:Quartz tubes are commonly used in semiconductor wafer high-temperature diffusion furnaces for doping (such as phosphorus or boron diffusion) or annealing (activating dopants).Carrier lifetime is a key parameter for evaluating silicon wafer quality. If quartz tube impurities (such as metal ions) contaminate the wafers, it can lead to increased carrier recombination and reduced lifetime.Tests involve measuring the minority carrier lifetime to evaluate the process impact on the wafer\u2019s electrical performance. Epitaxy:Quartz tubes are used in CVD (Chemical Vapor Deposition) reaction chambers. If the tube wall becomes contaminated or experiences devitrification, the quality of the epitaxial layer may be affected, resulting in reduced […]<\/p>\n","protected":false},"author":1,"featured_media":6409,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"_seopress_robots_primary_cat":"none","_seopress_titles_title":"Which Tests Require Attention to Carrier Lifetime Values ((Part 3 of 10)","_seopress_titles_desc":"","_seopress_robots_index":"","_uag_custom_page_level_css":"","site-sidebar-layout":"default","site-content-layout":"","ast-site-content-layout":"default","site-content-style":"default","site-sidebar-style":"default","ast-global-header-display":"","ast-banner-title-visibility":"","ast-main-header-display":"","ast-hfb-above-header-display":"","ast-hfb-below-header-display":"","ast-hfb-mobile-header-display":"","site-post-title":"","ast-breadcrumbs-content":"","ast-featured-img":"","footer-sml-layout":"","ast-disable-related-posts":"","theme-transparent-header-meta":"","adv-header-id-meta":"","stick-header-meta":"","header-above-stick-meta":"","header-main-stick-meta":"","header-below-stick-meta":"","astra-migrate-meta-layouts":"set","ast-page-background-enabled":"default","ast-page-background-meta":{"desktop":{"background-color":"var(--ast-global-color-4)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"tablet":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"mobile":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""}},"ast-content-background-meta":{"desktop":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"tablet":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"mobile":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""}},"footnotes":""},"categories":[1],"tags":[],"ppma_author":[21],"class_list":["post-6406","post","type-post","status-publish","format-standard","has-post-thumbnail","hentry","category-uncategorized","author-nola"],"uagb_featured_image_src":{"full":["https:\/\/globalquartztube.com\/wp-content\/uploads\/2025\/08\/High-temperature-diffusion-furnace.jpg",884,879,false],"thumbnail":["https:\/\/globalquartztube.com\/wp-content\/uploads\/2025\/08\/High-temperature-diffusion-furnace-150x150.jpg",150,150,true],"medium":["https:\/\/globalquartztube.com\/wp-content\/uploads\/2025\/08\/High-temperature-diffusion-furnace-300x298.jpg",300,298,true],"medium_large":["https:\/\/globalquartztube.com\/wp-content\/uploads\/2025\/08\/High-temperature-diffusion-furnace-768x764.jpg",768,764,true],"large":["https:\/\/globalquartztube.com\/wp-content\/uploads\/2025\/08\/High-temperature-diffusion-furnace.jpg",884,879,false],"1536x1536":["https:\/\/globalquartztube.com\/wp-content\/uploads\/2025\/08\/High-temperature-diffusion-furnace.jpg",884,879,false],"2048x2048":["https:\/\/globalquartztube.com\/wp-content\/uploads\/2025\/08\/High-temperature-diffusion-furnace.jpg",884,879,false],"trp-custom-language-flag":["https:\/\/globalquartztube.com\/wp-content\/uploads\/2025\/08\/High-temperature-diffusion-furnace-12x12.jpg",12,12,true]},"uagb_author_info":{"display_name":"Nola Zhang","author_link":"https:\/\/globalquartztube.com\/ja\/author\/nola\/"},"uagb_comment_info":9,"uagb_excerpt":"1. Semiconductor Device Manufacturing (Highly Relevant) High-Temperature Diffusion\/Annealing Processes:Quartz tubes are commonly used in semiconductor wafer high-temperature diffusion furnaces for doping (such as phosphorus or boron diffusion) or annealing (activating dopants).Carrier lifetime is a key parameter for evaluating silicon wafer quality. If quartz tube impurities (such as metal ions) contaminate the wafers, it can lead…","authors":[{"term_id":21,"user_id":1,"is_guest":0,"slug":"nola","display_name":"Nola Zhang","avatar_url":{"url":"https:\/\/globalquartztube.com\/wp-content\/uploads\/2024\/06\/Casper-Peng.webp","url2x":"https:\/\/globalquartztube.com\/wp-content\/uploads\/2024\/06\/Casper-Peng.webp"},"0":null,"1":"","2":"","3":"","4":"","5":"","6":"","7":""}],"_links":{"self":[{"href":"https:\/\/globalquartztube.com\/ja\/wp-json\/wp\/v2\/posts\/6406","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/globalquartztube.com\/ja\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/globalquartztube.com\/ja\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/globalquartztube.com\/ja\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/globalquartztube.com\/ja\/wp-json\/wp\/v2\/comments?post=6406"}],"version-history":[{"count":3,"href":"https:\/\/globalquartztube.com\/ja\/wp-json\/wp\/v2\/posts\/6406\/revisions"}],"predecessor-version":[{"id":6494,"href":"https:\/\/globalquartztube.com\/ja\/wp-json\/wp\/v2\/posts\/6406\/revisions\/6494"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/globalquartztube.com\/ja\/wp-json\/wp\/v2\/media\/6409"}],"wp:attachment":[{"href":"https:\/\/globalquartztube.com\/ja\/wp-json\/wp\/v2\/media?parent=6406"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/globalquartztube.com\/ja\/wp-json\/wp\/v2\/categories?post=6406"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/globalquartztube.com\/ja\/wp-json\/wp\/v2\/tags?post=6406"},{"taxonomy":"author","embeddable":true,"href":"https:\/\/globalquartztube.com\/ja\/wp-json\/wp\/v2\/ppma_author?post=6406"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}
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2.\u592a\u967d\u96fb\u6c60\u8a66\u9a13<\/h3>\n\n\n\n
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\u5c11\u6570\u30ad\u30e3\u30ea\u30a2\u306e\u30e9\u30a4\u30d5\u30bf\u30a4\u30e0\u3092\u6e2c\u5b9a\u3059\u308b\u305f\u3081\u306b\u3001QSSPC\uff08\u6e96\u5b9a\u5e38\u5149\u5c0e\u96fb\u7387\uff09\u307e\u305f\u306f\u03bc-PCD\uff08\u30de\u30a4\u30af\u30ed\u6ce2\u5149\u5c0e\u96fb\u7387\u6e1b\u8870\uff09\u3092\u7528\u3044\u3066\u6e2c\u5b9a\u304c\u884c\u308f\u308c\u308b\u3002.<\/p>\n\n\n\n
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\u70ad\u5316\u30b1\u30a4\u7d20(SiC)\u3084\u7a92\u5316\u30ac\u30ea\u30a6\u30e0(GaN)\u30c7\u30d0\u30a4\u30b9\u306e\u9ad8\u6e29\u30d7\u30ed\u30bb\u30b9(>1500\u2103)\u306b\u306f\u3001\u8d85\u9ad8\u7d14\u5ea6\u306e\u77f3\u82f1\u7ba1\u304c\u5fc5\u8981\u3067\u3059\u3002\u4e0d\u7d14\u7269\u306f\u754c\u9762\u6e96\u4f4d\u5bc6\u5ea6\u3092\u5897\u52a0\u3055\u305b\u3001\u30ad\u30e3\u30ea\u30a2\u5bff\u547d\u306e\u4f4e\u4e0b\u306b\u3064\u306a\u304c\u308a\u307e\u3059\u3002.
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\u65b0\u6750\u6599\uff08\u30da\u30ed\u30d6\u30b9\u30ab\u30a4\u30c8\u306a\u3069\uff09\u306e\u30ad\u30e3\u30ea\u30a2\u30c0\u30a4\u30ca\u30df\u30af\u30b9\u3092\u30c6\u30b9\u30c8\u3059\u308b\u305f\u3081\u306e\u53cd\u5fdc\u5bb9\u5668\u3068\u3057\u3066\u3001\u5358\u306b\u77f3\u82f1\u7ba1\u3092\u4f7f\u7528\u3059\u308b\u9867\u5ba2\u3082\u3044\u308b\u3002.<\/p>\n\n\n\n
\n\n\n\n\u30c6\u30b9\u30c8\u306e\u59a5\u5f53\u6027<\/h3>\n\n\n\n
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